| Maximum load | 20~500 Kg |
| Maximum speed | 2 m/s |
| Maximum speed | 2 g |
| Repeat positioning accuracy | ±0.05mm |
| Location detection | Absolute value position feedback |
| Communication interface | EtherCAT & Ethernet |
| Controller/Driver | XiCS-CH/ XiCS-DX |
| Controller power supply | 24VDC |
| Driver power supply | 55VDC |